| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an electro-optical apparatus capable of controlling the quantity of an ejected liquid appropriately, a droplet ejection apparatus and a method of inspecting the ejection quantity. SOLUTION: A liquid ejection apparatus 20 has an ejection head 32 and ejects fine droplets toward a mother substrate 25 from the head 32. A weighing pan 47 for inspection of the ejection quantity is arranged on the substrate 25, and a carrying robot 41 moving the weighing pan 47 from the substrate 25 and a weighing instrument 42 for measurement of the weight of the liquid discharged from the head 32 to the weighing pan 47 are provided. Based on the weight of the liquid in the weighing pan 47, the weight of droplets ejected from the head 32 is calculated. When the calculated weight of fine droplets is out of a predetermined weight range, the ejection quantity of the head 32 is controlled according to the error of the weight of droplets. COPYRIGHT: (C)2007,JPO&INPIT
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