发明名称 BONDING APPARATUS
摘要 <p>A projection section having two mirrors at the leading end is sent from a side opening of a head, which is constituted by attaching a transparent sucking section to a lower opening of a reversely rotated frame having a recessed shape. A bump electrode functioning as an alignment mark formed on the surface of a chip component sucked and held by the sucking section, and the alignment mark on the surface of the substrate are reflected on the both mirrors provided on the projecting section. The both alignment marks are projected to a CCD camera arranged on the side, being separated from the head.</p>
申请公布号 WO2006129547(A1) 申请公布日期 2006.12.07
申请号 WO2006JP310446 申请日期 2006.05.25
申请人 TORAY ENGINEERING CO., LTD.;ARAI, YOSHIYUKI;HARE, TAKASHI 发明人 ARAI, YOSHIYUKI;HARE, TAKASHI
分类号 H01L21/52 主分类号 H01L21/52
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