| 发明名称 |
A MEASUREMENT SYSTEM AND A METHOD |
| 摘要 |
<p>The invention provides a method and a measurement system. The method includes: providing a measurement model that includes measurement image information; locating a measurement area by utilizing the measurement image information; and performing at least one measurement to provide measurement result information.</p> |
| 申请公布号 |
KR20060125738(A) |
申请公布日期 |
2006.12.06 |
| 申请号 |
KR20067008901 |
申请日期 |
2004.10.07 |
| 申请人 |
APPLIED MATERIALS ISRAEL, LTD. |
发明人 |
TAM AVIRAM |
| 分类号 |
H01L21/66;G06T5/00;G06T7/00;G06T7/60;H01L21/027 |
主分类号 |
H01L21/66 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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