发明名称 APPRATUS FOR GENERATING ION OF ION IMPLANTER
摘要 An ion generator of an ion implanter is provided to reduce the amount of residual ions within an arc chamber and increase the amount of injecting ions by generating electric field to a slit direction. An arc chamber(310) includes a slit and forms an equipotential surface by a first voltage. A filament(311) is installed inside the arc chamber to generate electrons at a predetermined temperature. A plurality of magnetic field elements(321,322) are installed outside the arc chamber to generate the magnetic field within the arc chamber. A gas emission element(314) injects a predetermined gas into the arc chamber. An electrode is positioned opposite to the slit to generate the magnetic field within the arc chamber by a second voltage.
申请公布号 KR100656955(B1) 申请公布日期 2006.12.06
申请号 KR20050135135 申请日期 2005.12.30
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, SEONG GU;SHIN, JAI KWANG;OH, JAE JOON
分类号 H01L21/265 主分类号 H01L21/265
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