THIN FILM BATTERY AND FABRICATION METHOD THEREOF

摘要

Provided are a thin film battery which is improved in capacity and is reduced in internal electrical resistance by increasing the thickness of a cathode and is excellent in high rate charge/discharge, and its preparation method. The thin film battery comprises a first current collector, a cathode, an electrolyte, an anode and a second current collector which are integrated on a substrate, wherein the cathode(2) comprises at least one pair of electrically conductive metal layer(22) and lithium transition metal oxide layer(21) layered on the first current collector(1) in turn. Preferably the electrically conductive metal layer is made of any one selected from the group consisting of Ag, Au, Pt, Pd, Cu, Co and their alloy and has a thickness of 5 Angstrom to 1 micrometer; and the lithium transition metal oxide layer is made of any one selected from the group consisting of LiCoO2, LiMn2O4, LiNiO2, LiCo_(1-x) Ni_x O2 and has a thickness of 0.5-3 micrometers.