APPARATUS FOR OPENING COVER OF LASER ANNEALING CHAMBER

摘要

A cover opening apparatus of a laser heat treatment chamber is provided to open easily a chamber cover by lifting slightly the chamber cover using a lifting/rolling unit and a cover support unit. A cover opening apparatus of a laser heat treatment chamber includes a chamber cover(130) for covering an upper opening portion of a chamber, a lifting/rolling unit(140) for supporting a lower portion of the cover and lifting the cover up, and a cover support unit(150) adjacent to the lifting/rolling unit. The cover supporting unit is capable of supporting both sides of the cover by stretching out a folded cover supporting body of the cover supporting unit itself.