| 摘要 |
A heater bar of an apparatus for heating an etching solution is provided to rapidly replace a heater bar and reduce fabricating costs by individually connecting/disconnecting a heater bar in question to/from a flange even when a part of a heater bar is contaminated by an etching solution or a heater is disconnected. A titanium cartridge heater(20) is press-fitted to the inside of a teflon tube(10). One end of the teflon tube is covered with a cap(30) sealed by teflon welding(31). The other end of the teflon tube is covered with a fitting cap(40). A screw thread(41) is formed in the outer circumferential surface of the fitting cap so that the fitting cap is screw-coupled to a flange. A wire(50) is disposed between the teflon tube and the titanium cartridge heater, penetrating the inside of the teflon tube.
|
