INTERGRATED THIN-FILM SOLAR CELLS AND METHOD OF MANUFACTURING THEREOF

摘要

An integrated thin film solar cell is provided to broaden the effective area of a solar cell by reducing an insulation interval between unit devices of the solar cell. Conductive materials(102) are formed on a substrate(101), patterned to be separated from each other by a predetermined interval between adjacent conductive materials. The conductive material is made of transparent conductive material or a metallic material. A solar cell(semiconductor) layer(103) is formed on the resultant structure. A first transparent conductive material(104) is obliquely deposited on the substrate having the conductive materials. By using the first transparent conductive material as a mask, the solar cell(semiconductor) layer is etched. A second transparent conductive material(105) is obliquely deposited to electrically connect the conductive material to the first transparent conductive material. The transparent conductive material is one of ZnO, SnO2 or ITO.