METHOD OF CHECKING EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR

摘要

A method for checking semiconductor manufacturing equipment is provided to increase efficiency and accuracy of work by maintaining a state of high vacuum in a process chamber. Gas is injected into a process chamber in order to increase the inner pressure of the process chamber to atmospheric pressure(S100). An upper cover is separated from the process chamber(S200). A transparent cover is installed on a position of the upper cover(S300). The inner pressure of the process chamber is lowered in a state of high vacuum(S400). A transferring arm is transferred to the inside of the process chamber(S500). The transparent cover is formed of quartz or glass.