| 摘要 |
Provided is equipment for preventing the by-product gas from being solidified to form powder, thereby preventing the powder from being stuck to the pipe when the by-product gas passes through a subsequent pipe at room temperature by passing a by-product gas generated from a reactor chamber through a dielectric-barrier discharge treatment process, a plasma treatment process or an UV lamp treatment process, thereby ionizing the by-product gas using instantaneous energy instead of heat. In an equipment for ionizing a by-product gas coming out of the reactor chamber through a vaporization or dissociation process to exhaust the ionized gas to a subsequent pipe as an equipment mounted between a reactor chamber(10) into which a plurality types of gases are introduced to proceed chemical reaction of the gases and exhaust a reaction by-product gas through a pipe(40) and a vacuum pump(20) for performing pumping operation to exhaust the by-product gas from the reaction chamber, the equipment as a chamber equipment(120) prevents the reaction by-product gas from being solidified by radiating heat from UV lamps to a reaction by-product gas introduced into the chamber equipment, thereby ionizing the reaction by-product gas such that the reaction by-product gas is reacted again while the reaction by-product gas is exhausted to the pump through a subsequent pipe.
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