THE IN-PLANE 3-AXIS INERTIA MEASUREMENT SYSTEMS WITH THE EXACT ALIGNMENT

摘要

A flat type 3-axis inertia measurement system with an exact alignment are provided to simplify a packaging process, increase a yield, and minimize a size of a manufactured inertia sensor. A flat type 3-axis inertia measurement system with an exact alignment includes an x-axis accelerating system(100) for detecting a translation motion of the x-axis, a y-axis accelerating system for detecting a translation motion of the y-axis, and a z-axis accelerating system for detecting a rotation motion of the z-axis.