发明名称 System and method for modulating flow through multiple ports in a proximity head
摘要 A method of forming a dynamic liquid meniscus includes forming a meniscus at a first size, the meniscus being formed between a proximity head and a first surface and changing the meniscus to a second size by modulating a flow through at least one of a set of ports on the proximity head. A system for modulating flow through the ports in a proximity head is also described.
申请公布号 US7143527(B2) 申请公布日期 2006.12.05
申请号 US20050273853 申请日期 2005.11.14
申请人 LAM RESEARCH CORPORATION 发明人 GARCIA JAMES P.;REDEKER FRED C.;DE LARIOS JOHN
分类号 F26B21/10 主分类号 F26B21/10
代理机构 代理人
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