| 摘要 |
An apparatus for preventing a shuttle error in semiconductor rainbow equipment is provided to suppress interference of a vacuum hose irrespective of front and rear operations of a shuttle. A shuttle shift apparatus includes a guide shaft(103), a supporting bar(101), and a vacuum hose(106). The guide shaft has a predetermined length. The supporting bar includes a shuttle which is operated in a front or a rear direction according to a guide of the guide shaft. The vacuum hose is installed at one side of the supporting bar. A predetermined cover unit(10) is installed at an upper part of the vacuum hose in order to suppress interference due to a driving operation of the supporting bar.
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