| 摘要 |
An SPM(Scanning Probe Microscopy) information storage system using piezoelectric effect and a data recording method therefor are provided so that it is unnecessary for a relatively high preload and to prevent a cantilever from being bent in an opposite direction of a recording medium by composing a piezoelectric driving part including a piezoelectric body and providing an additional load to the cantilever. A piezoelectric driving part(601) includes a piezoelectric body(303). A tip(402) is formed in an end of a cantilever(301), and the piezoelectric driving part(601) is integrated in the cantilever(301). A driving circuit supplies a driving voltage to the piezoelectric driving part(601). A recording medium(602) records data by the tip(402) formed in the cantilever(301). An upper electrode(302), a piezoelectric body(303), and a lower electrode(304) are successively laminated in the piezoelectric driving part(601).
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