| 摘要 |
<p>A syringe pump and a photo resist coater system using the same are provided to control accurately a flow rate of a fluid by absorbing and discharging continuously the fluid. A drive assembly(150) includes a movable member(152) which is moved to a first direction and a second direction opposite to the first direction. A first plunger(120) is fixed to the movable member in the first direction. A first syringe cylinder(110) includes a first nozzle(112) and is fixed to the first direction. The first plunger is inserted into the first syringe cylinder. A second plunger(140) is fixed to the movable member in the second direction. A second syringe cylinder(130) includes a second nozzle(132) and is fixed to the second direction. The second plunger is inserted into the second syringe cylinder.</p> |
