Projecting exposure method

摘要

A spatial light modulating method performs spatial light modulation of light produced by a light source. The method includes forming an image of a two-dimensional pattern of the light, which has been obtained from the spatial light modulation, on a photosensitive material, using an image-sided telecentric optical system. The method further includes altering an axial air separation, upstream of the photosensitive material, to thereby adjust a focusing point at the time of the formation of the image of the two-dimensional pattern of the light.