| 发明名称 |
CMP for corrosion-free CoFe elements for magnetic heads |
| 摘要 |
A method of manufacture of magnetic heads which include CoFe elements using CMP is presented. The method includes providing a slurry of Al<SUB>2</SUB>O<SUB>3</SUB>, adjusting the concentration of H<SUB>2</SUB>O<SUB>2 </SUB>in said slurry to within a range of 6-12% by volume and balancing mechanical polishing action. The balancing is done by adjusting the table speed of a mechanical polisher to within a range of 55-90 rpm, and adjusting polishing pressure to within a range of 5-7 psi. Also a magnetic head having elements made of CoFe material made by this method is disclosed.
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| 申请公布号 |
US7144518(B2) |
申请公布日期 |
2006.12.05 |
| 申请号 |
US20030734361 |
申请日期 |
2003.12.11 |
| 申请人 |
HITACHI GLOBAL STORAGE TECHNOLOGIES NETHERLANDS, B.V. |
发明人 |
BERGEVIN CHRISTOPHER W.;GUTHRIE HUNG-CHIN;HARRIS, III TOM KING;JIANG MING;YANG JOHN JAEKOYUN |
| 分类号 |
B44C1/22;B24B37/04;C09K3/14;G11B5/31 |
主分类号 |
B44C1/22 |
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