发明名称 Electrostatic-erasing abrasion-proof coating and method for forming the same
摘要 An abrasion-proof and static-erasing coating is formed on the contact surface of a contact image sensor. The coating comprises a first film having a high hardness and a low conductivity, a second film formed on the first film and having a low hardness and a high conductivity, and a third film having a high hardness and a high resistivity providing an abrasion-proof insulating external surface.
申请公布号 US7144629(B2) 申请公布日期 2006.12.05
申请号 US20030446695 申请日期 2003.05.29
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 ITOH KENJI
分类号 B32B9/00;C03C17/34;C03C17/42;C04B41/50;C04B41/52;C04B41/85;C04B41/89;C23C16/26;C23C16/509;H01L31/0216 主分类号 B32B9/00
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