Coating method using a deposition process of a cluster of ions, coating equipment using the coating method and a product manufactured by the coating method,申请号KR20040086130-传众专利搜索

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发明名称	Coating method using a deposition process of a cluster of ions, coating equipment using the coating method and a product manufactured by the coating method
摘要
申请公布号	KR100653939(B1)	申请公布日期	2006.12.04
申请号	KR20040086130	申请日期	2004.10.27
申请人		发明人
分类号	C23C14/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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