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发明名称
正型光阻组成物及使用它之图案形成方法
摘要
本发明揭示一种正型光阻组成物,其包括一种具有显示硷性之结构且可因酸之作用而增加在硷显影剂中溶解度之树脂,及一种使用它之图案形成方法。
申请公布号
TW200641536
申请公布日期
2006.12.01
申请号
TW095107183
申请日期
2006.03.03
申请人
富士照相软片股份有限公司
发明人
神田博美
分类号
G03F7/039(2006.01);H01L21/027(2006.01)
主分类号
G03F7/039(2006.01)
代理机构
代理人
何金涂;何秋远
主权项
地址
日本
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