PELLICLE AND NOVEL FLUORINATED POLYMER

摘要

A useful fluorinated polymer as a material for pellicle or the like, which exhibits high durability and transparency to short-wavelength light (ArF excimer laser of 193 nm oscillation wavelength or F2 excimer laser of 157 nm oscillation wavelength). There is provided a pellicle wherein the polymer (I) for use in pellicle film and/or adhesive therefor consists of one essentially having the following unit (1). The unit (1) is one wherein a fluorinated chain constituting a polymer main chain consists of carbon atoms and ether oxygen atoms, and wherein at least one of the main chain constituting carbon atoms is one constituting a cyclic group while at least one of the main chain constituting ether oxygen atoms is one not constituting a cyclic group. For example, the unit (1) is one of the following formula (A1): (A1) (wherein n is 1 or 2; RF1 is -F or - CF3; and RF2 is -F or a C1-C5 perfluoroalkyl).