| 摘要 |
<P>PROBLEM TO BE SOLVED: To attain highly precise two-dimensional and three-dimensional image recognition by a stereo vision by a plurality of cameras in a die bonder. <P>SOLUTION: A shift-lens optical system is configured by vertically arranging a plurality of cameras 3 and 4 on the substrate for allocating chips 1 in parallel at the upper part of the conveyance path of a carrier 2 such as a frame or tape so that their optical axes can be made vertical to the conveyance path. The image pickup regions of those cameras 3 and 4 are overlapped on the conveyance path, and the image of the bonding region of the carrier 2 moving to the overlapped image pickup region is recognized by stereo vision. <P>COPYRIGHT: (C)2007,JPO&INPIT |
