| 摘要 |
PROBLEM TO BE SOLVED: To provide a reduced pressure drier where bending of a lid part is prevented and a substrate can be uniformly dried. SOLUTION: The reduced pressure drier which dries a thin film formed on a main surface of a substrate W under reduced pressure includes a base part 13 and the lid part 11 which goes up and down with respect to the base part 13. The drier also includes a chamber 10 for covering a periphery of the substrate W, support pins 15 for supporting the substrate W in the chamber 10, a vacuum pump 34 for exhausting the chamber 10, a second chamber 40 formed above the lid part 11 in the chamber 10 and an exhaust device 47 for exhausting the second chamber 40. COPYRIGHT: (C)2007,JPO&INPIT
|
