Organic thin film transistor (OTFT), its method of fabrication, and flat panel display including OTFT

摘要

An Organic Thin Film Transistor (OTFT) having improved characteristics due to surface-treating of a portion of a substrate corresponding to a channel region using a fluoride-based gas to stabilize the channel region, a method of fabricating such an OTFT, and an organic Electroluminescent (EL) display including such an OTFT includes: treating a predetermined portion of a surface of a substrate; forming a source electrode and a drain electrode on portions of the substrate which have not been surface-treated; forming a semiconductor layer to contact the surface-treated portion of the substrate; forming a gate insulating layer on the substrate; and forming a gate on the gate insulating layer. The substrate is plasma surface-treated using a fluoride-based gas such as CF₄ or C₃F₈.