| 摘要 |
A vacuum chuck of semiconductor manufacturing equipment is provided to perform a process in a state that a wafer is clamped even though a vacuum error is generated. A vacuum chuck of semiconductor manufacturing equipment includes a body(210), a plurality of support parts(230a,230b), and vacuum lines(220a). The plurality of support parts project from an upper surface of the body to mount a wafer thereon, and provide a plurality of regions divided when the wafer is mounted. The vacuum lines are formed in the body to be connected to the regions to control pressures in the regions.
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