发明名称 OPTICAL ELEMENT, AND PROJECTION AND EXPOSURE DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide an optical element of which change in optical property is small even when it is kept under severe (bad) circumstances. <P>SOLUTION: In an optical element, a low refractive index layer consisting of a material of the low refractive index of 1.5 or lower, an intermediate refractive index layer consisting of a material of the intermediate refractive index of higher than 1.5 and lower than 1.6, and a high refractive index layer consisting of a material of the high refractive index of 1.6 or higher, are laminated on a substrate against the light in the wavelength range of 150 nm or longer and 500 nm or shorter in the design central wavelength. The intermediate refractive index layer has a film stress different from that of the low refractive index layer or the high refractive index layer, and its optical film thickness is an integral multiple of half the design central wavelength. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006323120(A) 申请公布日期 2006.11.30
申请号 JP20050146222 申请日期 2005.05.19
申请人 NIKON CORP 发明人 AMIHOSHI JUNJI
分类号 G02B1/11;G03F7/20;H01L21/027 主分类号 G02B1/11
代理机构 代理人
主权项
地址