| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas control actuator enabling minute travel in a wide scope of operation. <P>SOLUTION: This gas control actuator 10 includes an output mover 12, a guide part 16 for guiding the output mover 12 in the direction of travel, and a plurality of umbrella-like movers 20 arranged between them and having through holes at the center. A bottom face of the output mover 12 has a curved face seat 14, a bottom face of the guide part 16 has a curved face seat 18, and shapes of these curved faces correspond to shapes of curved faces of umbrella parts of each umbrella-like mover 20. Gas having driving gas pressure P<SB>1</SB>is supplied into a first gas supply passage 40 and gas having pressing gas pressure P<SB>2</SB>is supplied into a second gas supply passage 50 under the control of a control part 58. Amount of each clearance in the front and rear of the plurality of umbrella-like movers 20 is changed by controlling P<SB>1</SB>and P<SB>2</SB>, and the change of amount of clearance is enlarged in accordance with the number of clearances in the front and rear of the umbrella-like movers 20 to form an amount of travel in the axial direction of the output mover 12. <P>COPYRIGHT: (C)2007,JPO&INPIT |
