| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical waveguide structure and an optical waveguide substrate that have much latitude of design of a pattern shape, that facilitate formation of a core (optical path) with a high dimensional accuracy, and that are equipped with an optical waveguide excellent in durability. <P>SOLUTION: The optical waveguide structure 1 is equipped with: a semiconductor layer 2; an optical waveguide 9 with a cladding layers 91, 92 laminated on both sides of a core layer 93; optical path conversion parts 96a, 96b; conductive layers 51-53; a light emitting element 10, a light receiving element 11, and electronic circuit elements 12, 13 that are imbedded in the upper part of the semiconductor layer 2; and an insulation layer 3 connected to the upper face of the semiconductor layer 2. The core layer 93 is composed of a core part 94 and a cladding part comprising the optical path of transmission light. The core part 94 is, as the main material, of a resin composition containing a ring shaped olefin based resin. The core part 94 is formed into a desired shape by selectively irradiating the core layer 93 with an active radiation, wherein the core layer 93 is composed of a material whose refractive index varies by the irradiation of the active radiation or by further heating. <P>COPYRIGHT: (C)2007,JPO&INPIT |
