| 摘要 |
PROBLEM TO BE SOLVED: To make alignment for accurate control of position of a substrate in a process chamber even if a plurality of process chambers are provided. SOLUTION: In a load lock chamber 30, positioners 33a, 33b, 33c, and 33d are arranged for aligning a substrate S placed on buffers 31 and 32. A rectangular substrate S is pressed at four points by the abutment block 36 of the positioners 33a, 33b, 33c, and 33d, in the load lock chamber 30 for alignment in X-Y direction. The position is set for each process chamber, corresponding to processing position in each process chamber. COPYRIGHT: (C)2007,JPO&INPIT |
