| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion beam irradiation device restraining density of an ion beam from becoming uneven on a surface of a base plate, even when the base plate is scanned in a state that the ion beam is slanted against an ion beam irradiation direction. SOLUTION: Three axes perpendicularly crossing each other at one point are to be an X-axis, Y-axis, and Z-axis. A scanning device 14 linearly and reciprocally scans along an S-direction parallel with the direction of a base plate holding face 12 on which a holder 10 is supported. An irradiation angle control motor 86 changes an irradiation angleθof the ion beam 120 against the base plate holding face 12 by making the scanning device 14 and the holder 10 held by the scanning device 14 rotate with a rotation axis 88 parallel with the X-axis as a center to change the irradiation angleθof the ion beam 120 against the base plate holding face 12. A lifting device 92 makes the irradiation angle control motor 86 held thereon, the scanning device 14 supported by the motor 86, and the holder 10 held by the scanning device 14 move up and down in a Y-axis direction. COPYRIGHT: (C)2007,JPO&INPIT
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