发明名称 Reducing contamination in OLED processing systems
摘要 A method of vaporizing organic material for deposition of an organic layer on a substrate for use in making an OLED device includes providing a first vacuum chamber, vaporizing gettering material to coat a surface which is in or to be placed in the first vacuum chamber or in a second vacuum chamber, and vaporizing the organic material to deposit vaporized organic material on the substrate and leaving the substrate in the first chamber or moving it to the second chamber, whereby the gettering material reacts with contaminants to lessen incorporation of contaminants into the OLED device.
申请公布号 US2006269656(A1) 申请公布日期 2006.11.30
申请号 US20050138928 申请日期 2005.05.26
申请人 EASTMAN KODAK COMPANY 发明人 BOROSON MICHAEL L.;PLETEN ANATOLE;VAN SLYKE STEVEN A.;O'TOOLE TERRENCE R.
分类号 B05D5/12;C23C16/00 主分类号 B05D5/12
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