| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical tomographic imaging system capable of observing the tomographic image of an observation target with high resolving power by a simple constitution to obtain an image of higher resolving power and contrast. <P>SOLUTION: The partially coherent laser beam from light sources 1 and 2 is divided into the searching light going toward the observation target 24 and the reference beam going toward a fixed reflecting surface 12 by a beam splitter 10. The laser beam as the searching light is shifted in frequency by an optical modulation means 16 and the laser beam shifted in frequency is scanned in an optical axis direction and the direction crossing the same at a right angle and the observation target is scanned two-dimensionally. The reflected beam from the observation target is synthesized with the reference beam and interfering beam is generated in a light path 9d. The interfering beam, which is obtained by the movement of the laser beam in the optical axis direction and the scanning in the direction crossing the optical axis direction at a right angle, is taken out of detectors 27 and 28 as a time series interfering signal and the reflection intensity data of the observation target is acquired. Since there is a mechanical moving part in a searching light path in this constitution, a change in interfering characteristics accompanying mechanical scanning occurs hardly and optical adjustment also becomes easy. <P>COPYRIGHT: (C)2007,JPO&INPIT |
