| 摘要 |
PROBLEM TO BE SOLVED: To stabilize the output of a harmonic laser light, without having to impose special load on a chiller unit. SOLUTION: Cooling water, which permits temperature to vary periodically owing to on/off control from a chiller unit 16, enters a tank 52 on this side of a second holder 42. Heat exchange for cooling water in the tank 52 is implemented continuously, and hereby water temperature is averaged, whilst the cooling water stays in the tank 52. As a result, temperature variations of the cooling water supplied from the tank 52 to the second holder 42 are very much reduced. Consequently, temperature of a wavelength conversion crystal 30 held on the second holder 42 is stably kept near a reference value, even instantaneously, so that the output of a YAG second harmonic laser light SHG, generated from a YAG harmonic laser oscillator 10, is kept stably in the vicinity of a set value PS. COPYRIGHT: (C)2007,JPO&INPIT |
