| 摘要 |
PROBLEM TO BE SOLVED: To provide a casset for a substrate which is formed of resin member excellent in antistatic nature and antifriction wear nature, wherein a member at a part to be brought into contact with at least a substrate is stably controlled in its surface resistivity to be in a desirable range of 10<SP>6</SP>-10<SP>14</SP>Ω/sq, and the variation in the surface resistivity by place is small. SOLUTION: In the casset for a substrate, the member at a part to be brought into contact with at least a substrate is a resin member formed of resin composite containing 30-94 wt.% synthetic resin, 5-40 wt.% carbon precursor having the volume resistivity 10<SP>2</SP>-10<SP>10</SP>Ωcm, and 1-30 wt.% conductive loading material having the volume resistivity less than 10<SP>2</SP>. The static decay time duration until the potential of the resin member falls off to 50 V from 5,000 V is less than 2 seconds. COPYRIGHT: (C)2007,JPO&INPIT |
