DEVICE FOR CLEANING THE INTERIOR OF VACUUM CHAMBERS

摘要

The invention relates to a device for cleaning the interior of vacuum chambers, such as in plant technology for surface modification and vacuum coating technology for application on various substrates. The aim of the invention is an effective cleaning inside said chamber with removal of free particles. Said device comprises at least one electrode, arranged on a support, which may be passed through or introduced into a vacuum chamber. The electrode(s) is(are) connected to a DC source or can be connected thereto. Electrically-charged or polar contaminants can thus be electrostatically fixed to at least one electrode and removed from a vacuum chamber by means of the device.