| 摘要 |
A loadlock chamber is provided to improve a calibration operation of a wafer mapping sensor by forming a wafer mapping sensor exposing unit on a door cover to improve a structure of the door cover. A chamber has a doorway(120). A door opens and shuts the doorway. A wafer mapping sensor(140) is mounted on the door. A door cover(150) covers an external of the door. A wafer mapping sensor exposing unit(152) is formed on the door cover. An exposing unit opening and shutting unit(160) opens and shuts the wafer mapping sensor exposing unit. The exposing unit opening shutting unit includes a plate(162) that is screw-coupled to the door through the wafer mapping sensor exposing unit. The door includes at least one first perspective window(131). The door cover includes second perspective windows(154), wherein the number of the second perspective windows is the same as that of the first perspective windows.
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