VERTICAL TYPE MULTI WORKPIESE PROCESSING SYSTEM AND METHOD THEREFOR

摘要

A vertical type multi substrates processing system and a method are provided to minimize volume of a process chamber and a carrying space by using a first substrate carrying unit for performing a process in a vertical state of substrates. A cassette(110) receives substrates in a horizontal state. The cassette is placed on a table. The table changes a position of the cassette horizontally or vertically. The table is conveyed along a first straight conveying route(104). A second conveying route(108) is arranged to be connected to the first conveying route. Plural processing units are arranged in parallel along the second conveying route. A process is performed in the processing unit when the substrate is in a vertical state. A first substrate carrying unit(150) is installed on the second conveying route. The first substrate carrying unit respectively loads the substrates in a vertical state from the cassette to the processing units.