发明名称 BROAD BAND OBJECTIVE HAVING IMPROVED LATERAL COLOR PERFORMANCE
摘要 A system and method for inspection is disclosed. The design generally employs as many as four design principles, including employing at least one lens from a relatively low dispersion glass, at least one additional lens from an additional material different from the relatively low dispersion glass, generally matching the relatively low dispersion properties of the relatively low dispersion glass. The design also may include at least one further lens from a further material different from and exhibiting a significantly different dispersion power from the relatively low dispersion glass and the additional material. Finally, the design may include lenses positioned to insert a significant amount of color within the objective, a gap, and additional lenses, the gap and additional lenses serving to cancel the color inserted.
申请公布号 WO2006127434(A2) 申请公布日期 2006.11.30
申请号 WO2006US19381 申请日期 2006.05.19
申请人 KLA-TENCOR TECHNOLOGIES CORPORATION;CHUANG, YUNG-HO;SHAFER, DAVID;ARMSTRONG, J., JOSEPH 发明人 CHUANG, YUNG-HO;SHAFER, DAVID;ARMSTRONG, J., JOSEPH
分类号 G02B21/02 主分类号 G02B21/02
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