SEMICONDUCTOR MANUFACTURING EQUIPMENT HAVING SENSITIVITY DISPLAY UNIT

摘要

Semiconductor manufacture equipment having a sensitivity-display unit is provided to reduce unnecessary inter-lock by checking sensitivity of a sensor through the sensitivity-display unit. A wafer loading/unloading unit(170) is prepared at a side of a main frame(110). A cassette stage(171) is formed on the wafer loading/unloading unit. A wafer cassette(80) where plural wafers(90) are loaded is placed on the cassette stage. A wafer detecting sensor is installed on the cassette stage to detect an alignment state of the wafers and has a signal transmitting unit(172) for transmitting a predetermined signal and a receiving unit(173) for receiving the predetermined signal. A sensitivity-display unit(174) displays sensitivity of the receiving unit to the outside. The sensitivity-display unit is connected to the receiving unit and installed on a side of the receiving unit.