| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric body thin film element without causing cracking in the film during manufacturing, having a high piezoelectric strain constant value, and the favorable adhesion of the film to a lower electrode, and to provide an ink jet recording head which achieves printing with high definition using the piezoelectric body thin film element. <P>SOLUTION: The piezoelectric body thin film element comprises a piezoelectric body film made of a polycrystalline material, and an upper electrode and the lower electrode which are arranged on both sides of the piezoelectric body film. The crystalline material of the piezoelectric body film is formed nearly in a vertical direction with respect to the electrode surface. <P>COPYRIGHT: (C)2007,JPO&INPIT |
