BARRIER FILM AND ORGANIC ELECTROLUMINESCENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a barrier film having high gas barrier properties and high productivity and to provide an organic EL device having the barrier film. SOLUTION: In the barrier film 1 comprising at least one layer or more of each of an organic compound layer 4 and an inorganic compound layer 3, the organic compound layer is the one formed by supplying at least a cyclic compound containing nitrogen or a cyclic compound containing sulfur or a cyclic compound containing oxygen. The barrier film has high barrier properties on water vapor and oxygen and can be produced in productivity as high as several times to several tens times compared with the conventional barrier film. Further, it has higher barrier properties than those of a 5-member cyclic compound, satisfying the objective barrier properties. COPYRIGHT: (C)2007,JPO&INPIT