| 摘要 |
PROBLEM TO BE SOLVED: To reduce variation of the treatment within a micro-fluid-device. SOLUTION: Recessed parts are formed on one surface of the first substrate 103, and the second substrate 104 is arranged so as to lie opposite to the surface of the first substrate having the recesses. The third substrate 102 is arranged on the back surface of the first substrate to join the first and second substrates tightly. A fine passage and a fine spacing are formed between the recesses of the first substrate and the second substrate. The passage and spacing communicate with each other and have at least one inlet and one outlet. The fifth substrate 105 contains the first and third substrates. The fourth substrate 101 is enganged in the fifth substrate. When the fourth and fifth substrates are fastened through a screw serving as a pressurizing means, the first and second substrates are pressurized. COPYRIGHT: (C)2007,JPO&INPIT
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