| 摘要 |
PROBLEM TO BE SOLVED: To provide an acoustic sensor which is capable of obtaining a desired frequency characteristic with good reproducibility while being miniaturized. SOLUTION: An acoustic sensor chip 1 has a back plate part 14 provided on the rear side of a diaphragm part 12 continuously and integrally formed on the inside of a frame-shaped support part 11, through a spacer part 13. A three-dimensional circuit board 4 interposed between a base board comprising a printed circuit board disposed in opposition to the rear side of the acoustic sensor chip 1 and the acoustic sensor chip 1 has an opening 42 formed, and the base board 2 and the three dimensional circuit board 4 constitute a housing which is disposed on the rear side of the acoustic sensor chip 1 and forms a rear chamber 6 between the housing itself and the acoustic sensor chip 1. The support part 11 of the acoustic sensor chip 1 is pierced in the thickness direction by an air hole 9 for setting an acoustic resistance between the rear chamber 6 and the outside. COPYRIGHT: (C)2007,JPO&INPIT
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