| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum sticking method and a vacuum sticking apparatus therefor, in which space saving is considered and whose cycle time is shortened. SOLUTION: In the vacuum sticking method, the internal space of a vacuum chamber arranged on a rotary table is negatively pressurized along with the rotation of the rotary table, and an upper disk and a lower disk are stuck in the internal space. The vacuum chamber comprises an upper chamber and a lower chamber and the upper disk held in the upper chamber and the lower disk held in the lower chamber are stuck. The lower disk is held in the state that the center part of the lower disk is made concave and the both disks are stuck by dropping the upper disk on the lower disk. COPYRIGHT: (C)2007,JPO&INPIT
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