| 摘要 |
PROBLEM TO BE SOLVED: To prevent wrong extraction of normal measured data as abnormal data in dependence on a scanning route by a probe of a three-dimensional shape measuring machine. SOLUTION: In this three-dimensional shape measuring method, the probe is scanned along a prescribed route on a measuring surface to thereby measure the three-dimensional shape of the measuring surface, and a position where the scanning direction of the route is changed in the measured three-dimensional shape data is detected, and the measured three-dimensional shape data are divided at the detected position, and filter processing is performed relative to each divided data, and the data subjected to the filter processing are reconstituted to acquire measured data. COPYRIGHT: (C)2007,JPO&INPIT
|
