发明名称 MOSFET HAVING CHANNEL IN BULK SEMICONDUCTOR AND SOURCE/DRAIN ON INSULATOR, AND METHOD OF FABRICATION
摘要 A MOSFET device ( 100 ) in a mono-crystalline semiconductor material ( 101 ) of a first conductivity type, which comprises a source and a drain of the opposite conductivity type, each having regions of polycrystalline semiconductor ( 110, 120 ) and respective junctions ( 112 a, 122 a) in monocrystalline semiconductor. Localized buried insulator regions ( 113, 123 ) are below the polycrystalline source and drain regions, and a gate ( 130 ) between the source and drain regions is located so that the gate channel ( 134 ) is formed in bulk mono-crystalline semiconductor material. As an example, the semiconductor is silicon, the first conductivity type is p-type and the localized buried insulator is silicon dioxide. The semiconductor material may also include silicon germanium.
申请公布号 US2006267061(A1) 申请公布日期 2006.11.30
申请号 US20060462406 申请日期 2006.08.04
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 HOWARD GREGORY E.
分类号 H01L29/94;H01L21/336;H01L29/06;H01L29/10;H01L29/417;H01L29/78 主分类号 H01L29/94
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