FRAME FOR METAL MASK, AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To reduce the weight of a frame in a mask unit for vapor deposition in which a metal mask under tension is fixed to and held by the frame of a window frame shape. SOLUTION: A large number of holes 31 are formed in a thin plate 13b of the window frame shape through etching. A large number of thin plates 13b are laminated and integrated with each other through the thermal diffusion coupling to form a frame 13 of the integrated structure. The weight of the frame is reduced by the presence of the holes 31. COPYRIGHT: (C)2007,JPO&INPIT