| 摘要 |
PROBLEM TO BE SOLVED: To obtain at least two different observation images without consuming time, with such a simple operation of moving a stage for obtaining an observation image at an arbitrary position on a sample, to simultaneously display the images and to observe the images. SOLUTION: The stage 1 is moved so that the desired observation image in the optional position on the sample 2 can be obtained, when finishing the movement of the stage 1, image data on the observation image by bright field illumination is obtained; next, the observation method is switched from the bright field illumination to dark field illumination; image data on the observation image by the dark field illumination is obtained; and the image data on the observation image obtained by the bright field illumination and the image data on the observation image obtained by the dark field illumination are displayed simultaneously on the screen of a display part 22. COPYRIGHT: (C)2007,JPO&INPIT
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