| 摘要 |
PROBLEM TO BE SOLVED: To easily connect and release a probe card to/from a test head connected via coaxial connectors. SOLUTION: This interface 100 provided in the test head 13 for connecting the probe card 10 to the test head 13 is provided with an interface main body 1, the coaxial connector 2 supported by the interface main body 1, and an energizing mechanism 3 supported by the interface main body 1, and for energizing the probe card 10 toward a direction of disengaging the probe card 10, whith the coaxial connector 2 engaged with the mating coaxial connector 15 provided in the probe card 10. COPYRIGHT: (C)2007,JPO&INPIT
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