EVALUATION METHOD OF CONTAMINATION STATE IN SPACE IN CLEAN ROOM

摘要

PROBLEM TO BE SOLVED: To provide a method for evaluating simply the contamination state caused by a boron compound in a space in a clean room without using a dilute acid solution when sampling the boron compound. SOLUTION: This evaluation method of the contamination state in the space in the clean room is characterized as follows: a space gas in the clean room is circulated through a column filled with a powder made of cellulose or a filter on which a membrane filter made of cellulose is mounted; hereby, the boron compound included in the space gas is adsorbed on the powder made of cellulose or the membrane filter made of cellulose; then, the adsorbed boron compound is desorbed from the powder made of cellulose or the membrane filter made of cellulose; and the desorbed boron compound is analyzed. COPYRIGHT: (C)2007,JPO&INPIT